Problem epi2 SNF 2009-06-07 17:50:53: Problems for Auto run and lift of Chamber A

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Jun 9 15:07:13 PDT 2009


exercized the lift ~10 but could not reproduce lift error.
Created a new sequence...system now runs in Auto




More information about the epi2-pcs mailing list