Shutdown epi2 SNF 2009-06-12 09:38:37: Overpressure + heater contact off.
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Fri Jun 12 10:56:10 PDT 2009
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Shutdown epi2 SNF 2009-06-12 09:38:37: Overpressure + heater contact off.
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Problem epi2 SNF 2009-06-12 17:54:02: Wafer shattered in LL B
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Shutdown epi2 SNF 2009-06-12 09:38:37: Overpressure + heater contact off.
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Problem epi2 SNF 2009-06-12 17:54:02: Wafer shattered in LL B
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