Problem epi2 SNF 2009-06-13 23:48:41: all wafers have a small haze

[gth at snf.stanford.edu]

all 4 inch wafers for 5 cycle thick epi-Ge, have a semicircular (Diameter 1cm) haze on the side of the second flat of the  4 inch wafer.
this might give some indication of the poor positioning of the wafer stage in the epi chamber.
particles are consistent. I guess no one is complaninig about that :)