Problem epi2 SNF 2009-06-13 23:48:41: all wafers have a small haze

gth at snf.stanford.edu gth at snf.stanford.edu
Sat Jun 13 23:48:41 PDT 2009


all 4 inch wafers for 5 cycle thick epi-Ge, have a semicircular (Diameter 1cm) haze on the side of the second flat of the  4 inch wafer.
this might give some indication of the poor positioning of the wafer stage in the epi chamber.
particles are consistent. I guess no one is complaninig about that :)




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