Problem epi2 SNF 2009-06-14 09:31:01: Pressure Setpoint Faults

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Sun Jun 14 09:31:02 PDT 2009


Chamber had pressure setpoints faults in GE ETCH COAT recipe.  Brought system back from ISOLATED state both times.
This problem has been occuring frequently and needs to be properly addressed now and finally.




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