Comment epi2 SNF 2009-06-15 09:56:02: Throttle valve on order

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Jun 15 09:56:03 PDT 2009


Throttle valve ordered a week and a half ago...no delivery date yet.
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We will continue to experience pressure setpoint problems until it is replaced.
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Pressure problem occurs during etch program when system is running hi pressure (needed to HCl clean the chamber).
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Some user may choose to wait until the valve is repaired before running multiple wafers over night or stay around to reset system if there is a pressure fault.




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