Comment epi2 SNF 2009-06-15 09:56:02: Throttle valve on order

maurice at maurice at
Mon Jun 15 09:56:03 PDT 2009

Throttle valve ordered a week and a half delivery date yet.
We will continue to experience pressure setpoint problems until it is replaced.
Pressure problem occurs during etch program when system is running hi pressure (needed to HCl clean the chamber).
Some user may choose to wait until the valve is repaired before running multiple wafers over night or stay around to reset system if there is a pressure fault.

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