Comment epi2 SNF 2009-06-16 17:17:18: Ge epi spot

filip at snf.stanford.edu filip at snf.stanford.edu
Tue Jun 16 17:17:18 PDT 2009

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small hazy disk ~5mm on left edge of wafer. Same as gth reported.
Otherwise no errors.

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Next message: Shutdown epi2 SNF 2009-06-17 09:34:02: pressure set point deviation error.
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