Problem epi2 SNF 2009-06-12 17:54:02: Wafer shattered in LL B
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Thu Jun 18 15:33:04 PDT 2009
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Problem epi2 SNF 2009-06-12 17:54:02: Wafer shattered in LL B
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Problem epi2 SNF 2009-06-13 23:21:31: ChA pressure setpoint deviation error
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Loadlock and cassette cleaned
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Problem epi2 SNF 2009-06-12 17:54:02: Wafer shattered in LL B
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Problem epi2 SNF 2009-06-13 23:21:31: ChA pressure setpoint deviation error
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