Problem epi2 SNF 2009-06-27 22:39:48: haze galore.

gth at snf.stanford.edu gth at snf.stanford.edu
Sat Jun 27 22:39:49 PDT 2009


perfect hazy wafers - on display. there is a lot of black rim on the circumference. System has to be checked.
observed problems both for 4 times Ge etch coat runs in the beginning and 1 long AAA Mega etch.




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