Shutdown epi2 SNF 2009-06-29 12:36:07: Wafer not centered on susceptor

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jun 29 15:14:05 PDT 2009


Added 100 counts to the wafer extension into the chamber.  Maurice is now checking the process.




More information about the epi2-pcs mailing list