Shutdown epi2 SNF 2009-06-29 16:09:42: Testing for haze
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Jun 29 16:09:42 PDT 2009
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Shutdown epi2 SNF 2009-06-29 12:36:07: Wafer not centered on susceptor
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Problem epi2 SNF 2009-05-15 16:40:55: particles on wafers + back of the wafers look bad.
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Gth is running thick Ge tests after wafer drop adjustment
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Shutdown epi2 SNF 2009-06-29 12:36:07: Wafer not centered on susceptor
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Problem epi2 SNF 2009-05-15 16:40:55: particles on wafers + back of the wafers look bad.
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