June 2009 Archives by subject

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Starting: Mon Jun 1 10:59:02 PDT 2009
Ending: Mon Jun 29 16:45:40 PDT 2009
Messages: 55

Comment epi2 SNF 2009-03-09 15:00:45: Updage maurice at snf.stanford.edu
Comment epi2 SNF 2009-03-13 16:26:18: Amat visit maurice at snf.stanford.edu
Comment epi2 SNF 2009-06-04 13:01:22: Scrubber work eenriquez at snf.stanford.edu
Comment epi2 SNF 2009-06-04 13:01:22: Scrubber work maurice at snf.stanford.edu
Comment epi2 SNF 2009-06-05 15:14:06: Dome inspected maurice at snf.stanford.edu
Comment epi2 SNF 2009-06-05 15:14:06: Dome inspected maurice at snf.stanford.edu
Comment epi2 SNF 2009-06-09 10:35:41: system reset maurice at snf.stanford.edu
Comment epi2 SNF 2009-06-09 10:35:41: system reset maurice at snf.stanford.edu
Comment epi2 SNF 2009-06-15 09:56:02: Throttle valve on order maurice at snf.stanford.edu
Comment epi2 SNF 2009-06-15 09:56:02: Throttle valve on order maurice at snf.stanford.edu
Comment epi2 SNF 2009-06-16 10:36:41: Throttle valve mdickey at snf.stanford.edu
Comment epi2 SNF 2009-06-16 10:36:41: Throttle valve maurice at snf.stanford.edu
Comment epi2 SNF 2009-06-16 17:17:18: Ge epi spot filip at snf.stanford.edu
Comment epi2 SNF 2009-06-17 10:34:39: Inspected dome and susceptor maurice at snf.stanford.edu
Comment epi2 SNF 2009-06-18 12:11:16: LLB casette filip at snf.stanford.edu
Comment epi2 SNF 2009-06-18 12:11:16: LLB casette maurice at snf.stanford.edu
Comment epi2 SNF 2009-06-26 16:12:14: wafer inspection ryw at snf.stanford.edu
Comment epi2 SNF 2009-06-26 23:38:24: wafer inspection ryw at snf.stanford.edu
Comment epi2 SNF 2009-06-29 11:02:09: leak checked maurice at snf.stanford.edu
Problem epi2 SNF 2009-05-15 16:40:55: particles on wafers + back of the wafers look bad. maurice at snf.stanford.edu
Problem epi2 SNF 2009-05-21 22:14:58: pressure errors; water flow errors eenriquez at snf.stanford.edu
Problem epi2 SNF 2009-06-04 16:13:53: pressure deviation fault during clean process till at snf.stanford.edu
Problem epi2 SNF 2009-06-04 16:13:53: pressure deviation fault during clean process maurice at snf.stanford.edu
Problem epi2 SNF 2009-06-07 17:50:53: Problems for Auto run and lift of Chamber A slcheng at snf.stanford.edu
Problem epi2 SNF 2009-06-07 17:50:53: Problems for Auto run and lift of Chamber A maurice at snf.stanford.edu
Problem epi2 SNF 2009-06-08 13:30:33: Quartz Wand jrjain at snf.stanford.edu
Problem epi2 SNF 2009-06-08 13:30:33: Quartz Wand tberg at snf.stanford.edu
Problem epi2 SNF 2009-06-08 21:45:35: Pressure Setpoint Deviation Fault... jrjain at snf.stanford.edu
Problem epi2 SNF 2009-06-08 21:45:35: Pressure Setpoint Deviation Fault... maurice at snf.stanford.edu
Problem epi2 SNF 2009-06-12 17:54:02: Wafer shattered in LL B rik at snf.stanford.edu
Problem epi2 SNF 2009-06-12 17:54:02: Wafer shattered in LL B maurice at snf.stanford.edu
Problem epi2 SNF 2009-06-13 23:21:31: ChA pressure setpoint deviation error gth at snf.stanford.edu
Problem epi2 SNF 2009-06-13 23:21:31: ChA pressure setpoint deviation error maurice at snf.stanford.edu
Problem epi2 SNF 2009-06-13 23:48:41: all wafers have a small haze gth at snf.stanford.edu
Problem epi2 SNF 2009-06-13 23:48:41: all wafers have a small haze maurice at snf.stanford.edu
Problem epi2 SNF 2009-06-14 09:31:01: Pressure Setpoint Faults jrjain at snf.stanford.edu
Problem epi2 SNF 2009-06-14 09:31:01: Pressure Setpoint Faults maurice at snf.stanford.edu
Problem epi2 SNF 2009-06-17 09:37:06: LLA or LLB ? gth at snf.stanford.edu
Problem epi2 SNF 2009-06-17 09:37:06: LLA or LLB ? maurice at snf.stanford.edu
Problem epi2 SNF 2009-06-17 09:46:12: hazy deps gone + particles stay gth at snf.stanford.edu
Problem epi2 SNF 2009-06-20 20:20:31: Particle on Wafers and Hazyness alsune at snf.stanford.edu
Problem epi2 SNF 2009-06-27 22:39:48: haze galore. gth at snf.stanford.edu
Shutdown epi2 SNF 2009-06-01 10:59:02: no pressure control maurice at snf.stanford.edu
Shutdown epi2 SNF 2009-06-01 10:59:02: no pressure control mdickey at snf.stanford.edu
Shutdown epi2 SNF 2009-06-08 11:14:47: inspecting lift action maurice at snf.stanford.edu
Shutdown epi2 SNF 2009-06-08 11:14:47: inspecting lift action maurice at snf.stanford.edu
Shutdown epi2 SNF 2009-06-11 14:11:46: wafer slide error filip at snf.stanford.edu
Shutdown epi2 SNF 2009-06-11 14:11:46: wafer slide error maurice at snf.stanford.edu
Shutdown epi2 SNF 2009-06-12 09:38:37: Overpressure + heater contact off. gth at snf.stanford.edu
Shutdown epi2 SNF 2009-06-12 09:38:37: Overpressure + heater contact off. maurice at snf.stanford.edu
Shutdown epi2 SNF 2009-06-17 09:34:02: pressure set point deviation error. gth at snf.stanford.edu
Shutdown epi2 SNF 2009-06-17 09:34:02: pressure set point deviation error. maurice at snf.stanford.edu
Shutdown epi2 SNF 2009-06-29 12:36:07: Wafer not centered on susceptor eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2009-06-29 12:36:07: Wafer not centered on susceptor eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2009-06-29 16:09:42: Testing for haze maurice at snf.stanford.edu

Last message date: Mon Jun 29 16:45:40 PDT 2009
Archived on: Sun Dec 23 08:52:52 PST 2012

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