From eenriquez at snf.stanford.edu Mon Mar 2 08:41:38 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Mar 2009 08:41:38 -0800 Subject: Problem epi2 SNF 2009-02-28 20:29:41: Heater contact error Message-ID: System seems ok after user cleared the error. From eenriquez at snf.stanford.edu Mon Mar 2 08:41:44 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Mar 2009 08:41:44 -0800 Subject: Problem epi2 SNF 2009-02-28 20:30:38: Heater contact error Message-ID: System seems ok after user cleared the error. From eenriquez at snf.stanford.edu Mon Mar 2 08:41:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Mar 2009 08:41:52 -0800 Subject: Comment epi2 SNF 2009-02-28 21:55:40: reset chamber, seems okay Message-ID: System seems ok after user cleared the error. From slcheng at snf.stanford.edu Mon Mar 2 18:03:15 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Mon, 2 Mar 2009 18:03:15 -0800 Subject: Problem epi2 SNF 2009-03-02 18:03:14: cannot run in automatic Message-ID: need to run the process in manual mode From maurice at snf.stanford.edu Thu Mar 5 10:47:13 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 5 Mar 2009 10:47:13 -0800 Subject: Comment epi2 SNF 2009-03-05 10:47:13: recovered wafer Message-ID: System aborted during Raja's process. Moved wafers from transfer chamber. Ran GeEtch recipe. From maurice at snf.stanford.edu Thu Mar 5 10:59:25 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 5 Mar 2009 10:59:25 -0800 Subject: Comment epi2 SNF 2009-03-05 10:59:25: inspected dome Message-ID: dome clear From maurice at snf.stanford.edu Thu Mar 5 10:59:45 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 5 Mar 2009 10:59:45 -0800 Subject: Comment epi2 SNF 2009-02-18 17:07:58: Ge testing Message-ID: logged From maurice at snf.stanford.edu Thu Mar 5 10:59:56 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 5 Mar 2009 10:59:56 -0800 Subject: Comment epi2 SNF 2009-02-20 07:41:24: system left in active idle again Message-ID: logged From maurice at snf.stanford.edu Thu Mar 5 11:00:07 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 5 Mar 2009 11:00:07 -0800 Subject: Comment epi2 SNF 2009-02-24 13:59:45: inspected doom Message-ID: logged From maurice at snf.stanford.edu Thu Mar 5 11:00:30 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 5 Mar 2009 11:00:30 -0800 Subject: Comment epi2 SNF 2009-01-28 06:19:42: Do not forget to return to inert idle Message-ID: logged From maurice at snf.stanford.edu Thu Mar 5 11:00:42 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 5 Mar 2009 11:00:42 -0800 Subject: Problem epi2 SNF 2009-02-12 17:13:26: Need test for Ge Message-ID: logged From skoh at snf.stanford.edu Sun Mar 8 13:32:35 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Sun, 8 Mar 2009 13:32:35 -0700 Subject: Problem epi2 SNF 2009-03-08 13:32:34: Upper Temperature higher Message-ID: I noticed that the wafer upper temperatures during my recipe wwere higher and more variable than before. There is about a 10-15C increase, and the temperatures are significantly more jumpy - varying in the range of 10C - compared to 2-3C previously. Can you check if the dome is coated and position of wafers on the susceptor? Thanks. From slcheng at snf.stanford.edu Sun Mar 8 23:11:33 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Sun, 8 Mar 2009 23:11:33 -0700 Subject: Problem epi2 SNF 2009-03-08 23:11:32: particles and pin mark on the back Message-ID: From slcheng at snf.stanford.edu Sun Mar 8 23:14:08 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Sun, 8 Mar 2009 23:14:08 -0700 Subject: Problem epi2 SNF 2009-03-08 23:14:07: particles and pin mark on the back Message-ID: i saw lots of particles on the surface. when examing the back side, one pin mark was found and backside is nearly completly coated. That probably means the wafer is tilted during the deposition. Is the arm sagging again? From eenriquez at snf.stanford.edu Mon Mar 9 09:46:41 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Mar 2009 09:46:41 -0700 Subject: Shutdown epi2 SNF 2009-03-09 09:46:41: Broken susceptor pins Message-ID: From eenriquez at snf.stanford.edu Mon Mar 9 15:00:45 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Mar 2009 15:00:45 -0700 Subject: Comment epi2 SNF 2009-03-09 15:00:45: Updage Message-ID: Waiting for susceptor support pins. They should be here on Wed. Also cleaning the exhaust port. From maurice at snf.stanford.edu Mon Mar 9 15:02:59 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 9 Mar 2009 15:02:59 -0700 Subject: Comment epi2 SNF 2009-03-09 15:02:59: EPI2 update 3/9/09 Message-ID: Elmer is having the susceptor pins modified. New pins will be in on Wed. This may decrease the amount of down time for pin breakage. - Gas inlets and exhaust outlet quartz is being cleaned and/or replaced. This may clean up some of the particle issues we have seen. - Upper chamber exhaust flange-removed and cleaned. From maurice at snf.stanford.edu Fri Mar 13 16:26:18 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 13 Mar 2009 16:26:18 -0700 Subject: Comment epi2 SNF 2009-03-13 16:26:18: Amat visit Message-ID: Dr Yihwan Kim and Jerry Bevers from AMAT's Front End Product Group came in and inspected our tool, answered process questions and looked over some of our recipes. Some hightlights: -We need to change the bottom dome. -We need to change to a susceptor suport that supports in the center. They will supply part #. -We need to do a temp cal once everything is buttoned up. _ -Minimun slit flow during processes: 3 sccm -During process run, contine to control LPID but watch power reading. Higher power values may indicate dome coating. -Our current etch recipes are good. We may need to adjust times. -Arsine depositions are a problem. Ideally, they should be done in a seperate chamber. _ We expect the system will be down all next week for the down replacement and waiting for parts that Jerry suggested we change. From eenriquez at snf.stanford.edu Mon Mar 23 14:54:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Mar 2009 14:54:04 -0700 Subject: Comment epi2 SNF 2009-03-23 14:54:04: Update Message-ID: Field service is currently replacing the bottom dome. we will perform the temperature calibration tomorrow. From maurice at snf.stanford.edu Tue Mar 31 14:25:28 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 31 Mar 2009 14:25:28 -0700 Subject: Comment epi2 SNF 2009-03-31 14:25:28: update 3/31/09 Message-ID: Sean is not her today... Initial temp call is done and it looks good. Still need final tuning. Still waiting for the 4 point susceptor support...expect it on friday. Expect tool will be ready for testing on friday.