Problem epi2 SNF 2009-03-02 18:03:14: cannot run in automatic
slcheng at snf.stanford.edu
slcheng at snf.stanford.edu
Mon Mar 2 18:03:15 PST 2009
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Comment epi2 SNF 2009-02-28 21:55:40: reset chamber, seems okay
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Comment epi2 SNF 2009-03-05 10:47:13: recovered wafer
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need to run the process in manual mode
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Comment epi2 SNF 2009-02-28 21:55:40: reset chamber, seems okay
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Comment epi2 SNF 2009-03-05 10:47:13: recovered wafer
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