Problem epi2 SNF 2009-03-08 13:32:34: Upper Temperature higher

skoh at snf.stanford.edu skoh at snf.stanford.edu
Sun Mar 8 13:32:35 PDT 2009


I noticed that the wafer upper temperatures during my recipe wwere higher and more variable than before.  There is about a 10-15C increase, and the temperatures are significantly more jumpy - varying in the range of 10C - compared to 2-3C previously.  Can you check if the dome is coated and position of wafers on the susceptor?  Thanks.




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