Problem epi2 SNF 2009-03-08 23:14:07: particles and pin mark on the back

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Sun Mar 8 23:14:08 PDT 2009


i saw lots of particles on the surface. when examing the back side, one pin mark was found and backside is nearly completly coated. That probably means the wafer is tilted during the deposition. Is the arm sagging again?




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