Comment epi2 SNF 2009-03-09 15:02:59: EPI2 update 3/9/09

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Mar 9 15:02:59 PDT 2009


Elmer is having the susceptor pins modified.  New pins will be in on Wed.  This may decrease the amount of down time for pin breakage.
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Gas inlets and exhaust outlet quartz is being  cleaned and/or replaced.  This may clean up some of the particle issues we have seen.
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Upper chamber exhaust flange-removed and cleaned.




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