Comment epi2 SNF 2009-03-09 15:02:59: EPI2 update 3/9/09

maurice at maurice at
Mon Mar 9 15:02:59 PDT 2009

Elmer is having the susceptor pins modified.  New pins will be in on Wed.  This may decrease the amount of down time for pin breakage.
Gas inlets and exhaust outlet quartz is being  cleaned and/or replaced.  This may clean up some of the particle issues we have seen.
Upper chamber exhaust flange-removed and cleaned.

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