Shutdown epi2 SNF 2009-05-04 13:28:45: wafer slide error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon May 4 14:22:14 PDT 2009


Water transfer was aborted because a door interlock was tripped.  Wafer transfer was OK.  Recovered the system.




More information about the epi2-pcs mailing list