Problem epi2 SNF 2009-05-09 17:54:43: heater contactor off

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Sat May 9 17:54:44 PDT 2009


According to the fault log, it seems that
too high pressure was observed and the heator contactor was off.
This symptom, from my experience, was seen after finishing
all wafer process sequence and running the last cleaning cycle.




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