Problem epi2 SNF 2009-05-09 17:54:43: heater contactor off

masaharu at masaharu at
Sat May 9 17:54:44 PDT 2009

According to the fault log, it seems that
too high pressure was observed and the heator contactor was off.
This symptom, from my experience, was seen after finishing
all wafer process sequence and running the last cleaning cycle.

More information about the epi2-pcs mailing list