Problem epi2 SNF 2009-05-10 08:28:05: isolated status

gth at snf.stanford.edu gth at snf.stanford.edu
Sun May 10 08:28:05 PDT 2009


finished my runs, running Ge etch coat.
then the system gave over pressure message.
and red status - went to isolated.
i pushed reset and then online.
went to pumpdown, inert idle , cold and hot
now safely in active.....ready for next user.
As per previous messages, the last Ge etch coat is giving problems.
please look into this. I think the feedback from users is consistent.




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