Shutdown epi2 SNF 2009-05-10 16:01:40: Wafer Slide Error

skoh at snf.stanford.edu skoh at snf.stanford.edu
Sun May 10 16:01:40 PDT 2009


Wafer slide error obtained when wafer was automatically being moved from transfer chamber to LLB.  Error message was Chamber Load Lock B wafer slide detected, followed by Cannot use specified chamber - Load Lock B is busy. Wafer appears to be in the transfer chamber, but it is unknown if the wafer is still positioned correctly.  I aborted the automatic sequencer.
There are 5 wafers in LLB.  And one wafer (LB:11) in transfer chamber.  These are important device wafers that must remain diff clean in the LLB for next process step.  Please do not unload wafers.




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