Shutdown epi2 SNF 2009-05-10 16:01:40: Wafer Slide Error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon May 11 09:33:54 PDT 2009

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Recovered the wafer.  Had to unloaded and reload the cassette in order to clear the wafer slide error.

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