Problem epi2 SNF 2009-05-13 12:46:41: wafer slip error

filip at snf.stanford.edu filip at snf.stanford.edu
Wed May 13 12:46:41 PDT 2009


recovered by manually transfering to LLB, hard resetting the LLB, re-loading, and continuing my process. 
I guess that some wafer sensor may be off, since wafer transferred OK in manual mode.




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