Shutdown epi2 SNF 2009-05-14 00:48:59: same problem as before

gth at snf.stanford.edu gth at snf.stanford.edu
Thu May 14 00:48:59 PDT 2009


overpressure in the etch coat
system aborted
isolated status. 
do not know how to fix this.
hence shutdown.
next user, free to use, if problem can be fixed.




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