Problem epi2 SNF 2009-05-21 22:14:58: pressure errors; water flow errors

ginel at snf.stanford.edu ginel at snf.stanford.edu
Thu May 21 22:14:58 PDT 2009


MANY ISSUES:
Will not run etchcoat ch a (the standard silicon clean) without pressure setpoint deviation faults that send it into isolated mode.
Then you have to get from isolated to inert idle to cold idle to hot idle, which brings up the water flow faults.
Tried to run recipe "si etch only" as a clean instead, also got pressure stabilization errors leading to isolated mode.
Gave up.  Have not cleaned the chamber after my one silicon deposition.  Maybe someone else will be able to.




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