Shutdown epi2 SNF 2009-05-22 15:36:05: Throttle valve is defective

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue May 26 10:39:18 PDT 2009


Throttle valve rebuilt and adjusted.
-
Etch recipes modified to minimize abrupt pressure changes and to increase chamber cleaning (possibly reducing particles)
-




More information about the epi2-pcs mailing list