May 2009 Archives by author

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Starting: Fri May 1 12:41:27 PDT 2009
Ending: Tue May 26 10:39:18 PDT 2009
Messages: 51

Shutdown epi2 SNF 2009-04-30 23:08:29: heater contactor/low water flow eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2009-05-04 13:28:45: wafer slide error eenriquez at snf.stanford.edu
Problem epi2 SNF 2009-05-02 20:10:28: heater/water flow issue again eenriquez at snf.stanford.edu
Problem epi2 SNF 2009-04-28 02:17:55: sam error. eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2009-05-07 14:12:12: Lower lamps being changed eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2009-05-10 16:01:40: Wafer Slide Error eenriquez at snf.stanford.edu
Comment epi2 SNF 2009-05-15 15:01:15: Update eenriquez at snf.stanford.edu
Comment epi2 SNF 2009-05-19 15:03:35: Update eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2009-05-21 04:09:48: low water flow issue again eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2009-05-22 15:36:05: Throttle valve is defective eenriquez at snf.stanford.edu
Problem epi2 SNF 2009-05-12 10:38:54: isolated again filip at snf.stanford.edu
Problem epi2 SNF 2009-05-13 12:46:41: wafer slip error filip at snf.stanford.edu
Problem epi2 SNF 2009-05-02 20:10:28: heater/water flow issue again ginel at snf.stanford.edu
Problem epi2 SNF 2009-05-21 22:14:58: pressure errors; water flow errors ginel at snf.stanford.edu
Shutdown epi2 SNF 2009-05-03 02:02:12: same problem - contactor issue gth at snf.stanford.edu
Comment epi2 SNF 2009-05-09 18:12:08: contactor issue work around gth at snf.stanford.edu
Problem epi2 SNF 2009-05-10 08:28:05: isolated status gth at snf.stanford.edu
Shutdown epi2 SNF 2009-05-14 00:37:54: same problem as before. gth at snf.stanford.edu
Shutdown epi2 SNF 2009-05-14 00:48:59: same problem as before gth at snf.stanford.edu
Problem epi2 SNF 2009-05-15 16:40:55: particles on wafers + back of the wafers look bad. gth at snf.stanford.edu
Problem epi2 SNF 2009-05-09 17:54:43: heater contactor off masaharu at snf.stanford.edu
Shutdown epi2 SNF 2009-05-03 02:02:12: same problem - contactor issue maurice at snf.stanford.edu
Shutdown epi2 SNF 2009-05-04 13:28:45: wafer slide error maurice at snf.stanford.edu
Shutdown epi2 SNF 2009-05-07 14:12:12: Lower lamps being changed maurice at snf.stanford.edu
Shutdown epi2 SNF 2009-05-06 22:31:55: process error, then LLB door doesn't close maurice at snf.stanford.edu
Problem epi2 SNF 2009-05-06 23:03:47: update maurice at snf.stanford.edu
Comment epi2 SNF 2009-04-13 11:14:25: inspected dome maurice at snf.stanford.edu
Problem epi2 SNF 2009-04-07 12:46:47: tool decided to run its own recipe maurice at snf.stanford.edu
Problem epi2 SNF 2009-04-17 23:37:12: CHA low water flow error maurice at snf.stanford.edu
Comment epi2 SNF 2009-02-25 15:11:13: LLB cassette cleaned maurice at snf.stanford.edu
Shutdown epi2 SNF 2009-05-14 00:48:59: same problem as before maurice at snf.stanford.edu
Shutdown epi2 SNF 2009-05-14 00:37:54: same problem as before. maurice at snf.stanford.edu
Problem epi2 SNF 2009-05-10 08:28:05: isolated status maurice at snf.stanford.edu
Problem epi2 SNF 2009-05-12 10:38:54: isolated again maurice at snf.stanford.edu
Problem epi2 SNF 2009-05-13 08:47:37: isolated status maurice at snf.stanford.edu
Problem epi2 SNF 2009-05-09 17:54:43: heater contactor off maurice at snf.stanford.edu
Problem epi2 SNF 2009-04-30 21:12:00: heater contactor off /low water flow again, again, and again maurice at snf.stanford.edu
Comment epi2 SNF 2009-05-09 18:12:08: contactor issue work around maurice at snf.stanford.edu
Problem epi2 SNF 2009-04-26 12:34:40: Repeat "Low Water Flow" maurice at snf.stanford.edu
Problem epi2 SNF 2009-04-26 10:32:11: heater cotactor off again "in the weekend" maurice at snf.stanford.edu
Problem epi2 SNF 2009-04-18 16:25:41: heater contactor off maurice at snf.stanford.edu
Comment epi2 SNF 2009-03-09 15:02:59: EPI2 update 3/9/09 maurice at snf.stanford.edu
Comment epi2 SNF 2009-05-15 15:01:15: Update maurice at snf.stanford.edu
Comment epi2 SNF 2009-05-19 15:03:35: Update maurice at snf.stanford.edu
Problem epi2 SNF 2009-05-13 12:46:41: wafer slip error maurice at snf.stanford.edu
Comment epi2 SNF 2009-03-23 14:54:04: Update maurice at snf.stanford.edu
Comment epi2 SNF 2009-03-05 10:47:13: recovered wafer maurice at snf.stanford.edu
Shutdown epi2 SNF 2009-05-22 15:36:05: Throttle valve is defective maurice at snf.stanford.edu
Problem epi2 SNF 2009-05-13 08:47:37: isolated status rik at snf.stanford.edu
Shutdown epi2 SNF 2009-05-10 16:01:40: Wafer Slide Error skoh at snf.stanford.edu
Shutdown epi2 SNF 2009-05-21 04:09:48: low water flow issue again yuhykr at snf.stanford.edu

Last message date: Tue May 26 10:39:18 PDT 2009
Archived on: Sun Dec 23 08:52:52 PST 2012

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