From junam at snf.stanford.edu Sun Nov 1 22:47:40 2009 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sun, 1 Nov 2009 22:47:40 -0800 Subject: Problem epi2 SNF 2009-11-01 22:47:39: error occurred Message-ID: while running epi2 for Ge in-situ doping recipe, "chamber A rotation stepper failed homing" error has occurred. From eenriquez at snf.stanford.edu Mon Nov 2 08:19:36 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Nov 2009 08:19:36 -0800 Subject: Shutdown epi2 SNF 2009-11-02 08:19:35: Intermittent rotation errors Message-ID: From gyama at snf.stanford.edu Mon Nov 2 13:30:50 2009 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 2 Nov 2009 13:30:50 -0800 Subject: Problem epi2 SNF 2009-11-02 13:30:49: wafer stuck in chamber Message-ID: From eenriquez at snf.stanford.edu Mon Nov 2 14:34:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Nov 2009 14:34:52 -0800 Subject: Comment epi2 SNF 2009-11-02 14:34:51: Update rotation problem Message-ID: Same error "Ch.A rotation step failed homing" but the mode of failure is different. In the past, the error occured when the rotation motor moved too slowly and doesn't quite make to the home position. Now, motor rotated too quickly and out of control. It looks like it has a defective motor encoder. Ordered a new encoder. No ETA yet. From eenriquez at snf.stanford.edu Wed Nov 4 13:34:22 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Nov 2009 13:34:22 -0800 Subject: Comment epi2 SNF 2009-11-04 13:34:21: Update rotation. Message-ID: Rotation motor encoder should be here by Friday or next Monday. From eenriquez at snf.stanford.edu Fri Nov 6 14:55:41 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Nov 2009 14:55:41 -0800 Subject: Comment epi2 SNF 2009-11-06 14:55:40: Update rotation error Message-ID: Field service came in and installed a new encoder motor. Now testing the system. From maurice at snf.stanford.edu Fri Nov 6 16:05:48 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Nov 2009 16:05:48 -0800 Subject: Problem epi2 SNF 2009-11-02 13:30:49: wafer stuck in chamber Message-ID: Wafer removed by AMAT FS From maurice at snf.stanford.edu Fri Nov 6 16:06:15 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Nov 2009 16:06:15 -0800 Subject: Comment epi2 SNF 2009-11-02 14:34:51: Update rotation problem Message-ID: encoder installed by AMAT FS From maurice at snf.stanford.edu Fri Nov 6 16:06:47 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Nov 2009 16:06:47 -0800 Subject: Problem epi2 SNF 2009-11-01 22:47:39: error occurred Message-ID: rotation encoder replaced From maurice at snf.stanford.edu Fri Nov 6 16:07:08 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Nov 2009 16:07:08 -0800 Subject: Problem epi2 SNF 2009-10-28 06:48:19: Ch A. Rotation Stepper Failure Message-ID: rotation encoder replaced From maurice at snf.stanford.edu Fri Nov 6 16:07:26 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Nov 2009 16:07:26 -0800 Subject: Comment epi2 SNF 2009-10-26 11:42:01: ran SiH4 autoseed w/ DCS Message-ID: logged From maurice at snf.stanford.edu Fri Nov 6 16:07:50 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Nov 2009 16:07:50 -0800 Subject: Comment epi2 SNF 2009-11-04 13:34:21: Update rotation. Message-ID: encoder here From maurice at snf.stanford.edu Fri Nov 6 16:17:37 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Nov 2009 16:17:37 -0800 Subject: Shutdown epi2 SNF 2009-11-06 16:17:36: no heat Message-ID: there doesn't seem like the lamps are getting any power From maurice at snf.stanford.edu Fri Nov 6 16:34:36 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Nov 2009 16:34:36 -0800 Subject: Shutdown epi2 SNF 2009-11-06 16:17:36: no heat Message-ID: Contacted Sean (AMAT FS)...he had turned off a breaker when checking the chamber. - Breaker reset...we have heat! From maurice at snf.stanford.edu Fri Nov 6 17:43:51 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Nov 2009 17:43:51 -0800 Subject: Comment epi2 SNF 2009-11-06 14:55:40: Update rotation error Message-ID: testing of rotation gave no problems From maurice at snf.stanford.edu Fri Nov 6 17:44:27 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Nov 2009 17:44:27 -0800 Subject: Shutdown epi2 SNF 2009-11-02 08:19:35: Intermittent rotation errors Message-ID: Field service came in and installed a new encoder motor. From maurice at snf.stanford.edu Fri Nov 6 17:44:44 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 6 Nov 2009 17:44:44 -0800 Subject: Problem epi2 SNF 2009-10-15 23:39:35: heater contactor off error. Message-ID: logged From junam at snf.stanford.edu Sun Nov 8 00:36:56 2009 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sun, 8 Nov 2009 00:36:56 -0800 Subject: Shutdown epi2 SNF 2009-11-08 00:36:56: Message-ID: From junam at snf.stanford.edu Sun Nov 8 00:38:34 2009 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sun, 8 Nov 2009 00:38:34 -0800 Subject: Shutdown epi2 SNF 2009-11-08 00:38:34: wafer stuck in chamber A Message-ID: From eenriquez at snf.stanford.edu Mon Nov 9 09:11:49 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Nov 2009 09:11:49 -0800 Subject: Shutdown epi2 SNF 2009-11-08 00:36:56: Message-ID: From eenriquez at snf.stanford.edu Mon Nov 9 09:17:38 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Nov 2009 09:17:38 -0800 Subject: Shutdown epi2 SNF 2009-11-08 00:38:34: wafer stuck in chamber A Message-ID: Chamber faulted for low DOP1 flow. Found DOP1 manual valves were both closed. Placed user's wafer in LLB and ran GEetch coat recipe. From cursive at snf.stanford.edu Mon Nov 9 20:53:12 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Mon, 9 Nov 2009 20:53:12 -0800 Subject: Problem epi2 SNF 2009-11-09 20:53:11: LoadLock pump fail, warning Message-ID: Try reset several times, it still doesn't work. From cursive at snf.stanford.edu Mon Nov 9 21:05:49 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Mon, 9 Nov 2009 21:05:49 -0800 Subject: Shutdown epi2 SNF 2009-11-09 21:05:49: chamber A bulb failed in lower outer zone Message-ID: When running the process, it shows this error message. And process is aborded. From eenriquez at snf.stanford.edu Tue Nov 10 15:21:11 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Nov 2009 15:21:11 -0800 Subject: Comment epi2 SNF 2009-11-10 15:21:10: Update Message-ID: Reset communication to the Loadlock pump. Should be ok to run for now but it has a fault for runtime over the maintenance limit (needs to be rebuilt). We should have a new pump by tomorrow. We also plan to replace the bottom lamps tomorrow. From maurice at snf.stanford.edu Wed Nov 11 18:25:31 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 11 Nov 2009 18:25:31 -0800 Subject: Shutdown epi2 SNF 2009-11-09 21:05:49: chamber A bulb failed in lower outer zone Message-ID: 4 lower lamps replaced From eenriquez at snf.stanford.edu Thu Nov 12 07:45:22 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Nov 2009 07:45:22 -0800 Subject: Comment epi2 SNF 2009-11-10 15:21:10: Update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Nov 12 07:46:11 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Nov 2009 07:46:11 -0800 Subject: Problem epi2 SNF 2009-11-09 20:53:11: LoadLock pump fail, warning Message-ID: Reset pump communication with the system. From eenriquez at snf.stanford.edu Thu Nov 12 07:46:37 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Nov 2009 07:46:37 -0800 Subject: Comment epi2 SNF 2009-09-28 08:55:50: Replaced HCl cylinder Message-ID: Archived From mdickey at snf.stanford.edu Thu Nov 12 10:36:57 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 12 Nov 2009 10:36:57 -0800 Subject: Shutdown epi2 SNF 2009-11-12 10:36:56: exhaust Message-ID: Down for house exhaust repair From mdickey at snf.stanford.edu Thu Nov 12 11:31:17 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 12 Nov 2009 11:31:17 -0800 Subject: Shutdown epi2 SNF 2009-11-12 10:36:56: exhaust Message-ID: house exhaust back up From ryw at snf.stanford.edu Sat Nov 14 10:25:12 2009 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Sat, 14 Nov 2009 10:25:12 -0800 Subject: Shutdown epi2 SNF 2009-11-14 10:25:12: shut down due to A bulb failed in upper inner zone Message-ID: From eenriquez at snf.stanford.edu Mon Nov 16 14:51:01 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Nov 2009 14:51:01 -0800 Subject: Comment epi2 SNF 2009-11-16 14:51:00: Update bulb failure Message-ID: Found a defective lamp holder. Unable to obtain the correct part number to order the part. Waiting for technical support to reply to my parts info request. From eenriquez at snf.stanford.edu Tue Nov 17 14:38:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 17 Nov 2009 14:38:47 -0800 Subject: Comment epi2 SNF 2009-11-17 14:38:46: Update bulb failure Message-ID: Order 10 lamp sockets. Parts are in stock (Kentucky) and the purchase request is currently awaiting approval. From eenriquez at snf.stanford.edu Thu Nov 19 14:33:23 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Nov 2009 14:33:23 -0800 Subject: Comment epi2 SNF 2009-11-19 14:33:22: Update bulb failure Message-ID: The socket has not arrived yet. According to Applied Materials, the part will not be available until 2/24/2010. The parts they had in stock were apparently for another customer. We are still trying to expedite the part from AMAT. We are also trying to find other sources. We found the part in Ebay (South Korea) and QT Tech (Singapore). In case you're interested in helping us search for the part, the part # is 0190-35030. We need at least one for now. I will try an experiment tomorrow to see If I could just bypass the bad socket. I want to see if the system can run with a lamp current imbalance (there will only be 3 lamps in the loop instead of 4). From eenriquez at snf.stanford.edu Fri Nov 20 09:56:54 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 Nov 2009 09:56:54 -0800 Subject: Comment epi2 SNF 2009-11-20 09:56:54: Update bulb failure Message-ID: Applied was able to expedite (1) socket for us and has been shipped. The part should be here today or Monday. From eenriquez at snf.stanford.edu Mon Nov 23 10:07:55 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Nov 2009 10:07:55 -0800 Subject: Shutdown epi2 SNF 2009-11-14 10:25:12: shut down due to A bulb failed in upper inner zone Message-ID: Installed new lamp holder. Ran Ge etch coat. From eenriquez at snf.stanford.edu Mon Nov 23 10:08:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Nov 2009 10:08:04 -0800 Subject: Comment epi2 SNF 2009-11-16 14:51:00: Update bulb failure Message-ID: Archived From eenriquez at snf.stanford.edu Mon Nov 23 10:08:16 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Nov 2009 10:08:16 -0800 Subject: Comment epi2 SNF 2009-11-17 14:38:46: Update bulb failure Message-ID: Archived From eenriquez at snf.stanford.edu Mon Nov 23 10:08:22 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Nov 2009 10:08:22 -0800 Subject: Comment epi2 SNF 2009-11-19 14:33:22: Update bulb failure Message-ID: Archived From eenriquez at snf.stanford.edu Mon Nov 23 10:08:29 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Nov 2009 10:08:29 -0800 Subject: Comment epi2 SNF 2009-11-20 09:56:54: Update bulb failure Message-ID: Archived From maurice at snf.stanford.edu Mon Nov 23 11:35:46 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 23 Nov 2009 11:35:46 -0800 Subject: Comment epi2 SNF 2009-10-08 22:31:13: haze surface with big dots Message-ID: User reports that after making modifications to his recipe the haze dots went away From slcheng at snf.stanford.edu Mon Nov 23 17:44:58 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Mon, 23 Nov 2009 17:44:58 -0800 Subject: Problem epi2 SNF 2009-11-23 17:44:57: Upper Inner Bulbs Message-ID: I believe the Bulbs in upper inner region are going to fail sometime soon.When running the Ge Etch Coat process, the power at upper inner region shows 6.13 KW at 1190 C.The power at lower inner region is 9 KW instead.These two regions are suppose to have the same or similar values during the heating.They showed the same value of 6 KW at 1050C. Therefore, I suspect the upper inner power cannot go higher than 6 KW right now.We should expect a shut down due to broken bulbs any time soon. Szulin From eenriquez at snf.stanford.edu Tue Nov 24 11:38:32 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Nov 2009 11:38:32 -0800 Subject: Comment epi2 SNF 2009-11-24 11:38:32: Update upper inner bulbs Message-ID: We will replace all the upper bulbs on Tuesday. All the lower heater bulbs will be replaced during the shutdown. From renshen at snf.stanford.edu Wed Nov 25 13:43:30 2009 From: renshen at snf.stanford.edu (renshen at snf.stanford.edu) Date: Wed, 25 Nov 2009 13:43:30 -0800 Subject: Problem epi2 SNF 2009-11-25 13:43:30: Lower outter lamp failed Message-ID: From maurice at snf.stanford.edu Wed Nov 25 17:00:46 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 25 Nov 2009 17:00:46 -0800 Subject: Problem epi2 SNF 2009-11-25 13:43:30: Lower outter lamp failed Message-ID: 4 lower lamps replaced. All upper lamps ohmed but found nothing wrong. Still planning on replacing upper lamps on Tues and lower lamps during Dec. shutdown. From maurice at snf.stanford.edu Mon Nov 30 11:00:22 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 30 Nov 2009 11:00:22 -0800 Subject: Shutdown epi2 SNF 2009-11-30 11:00:22: no wafer on blade Message-ID: From eenriquez at snf.stanford.edu Mon Nov 30 15:08:20 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Nov 2009 15:08:20 -0800 Subject: Shutdown epi2 SNF 2009-11-30 11:00:22: no wafer on blade Message-ID: None of the wafer sensors on the transfer chamber were working. Disabled and re-enable the wafer sensors. Moved wafer from LL to cool station several times with no problems. Need to run a wafer through the entire sequence. I did not have any clean wafers and I did not want to the use the user's wafers as dummies. From maurice at snf.stanford.edu Mon Nov 30 15:39:14 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 30 Nov 2009 15:39:14 -0800 Subject: Shutdown epi2 SNF 2009-11-30 15:39:14: no wafer on blade Message-ID: