Comment epi2 SNF 2009-10-26 11:42:01: ran SiH4 autoseed w/ DCS
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Fri Nov 6 16:07:26 PST 2009
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Problem epi2 SNF 2009-10-28 06:48:19: Ch A. Rotation Stepper Failure
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Shutdown epi2 SNF 2009-11-06 16:17:36: no heat
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Problem epi2 SNF 2009-10-28 06:48:19: Ch A. Rotation Stepper Failure
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Shutdown epi2 SNF 2009-11-06 16:17:36: no heat
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