Shutdown epi2 SNF 2009-11-08 00:38:34: wafer stuck in chamber A

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Nov 9 09:17:38 PST 2009


Chamber faulted for low DOP1 flow.  Found DOP1 manual valves were both closed.  Placed user's wafer in LLB and ran GEetch coat recipe.




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