Shutdown epi2 SNF 2009-11-09 21:05:49: chamber A bulb failed in lower outer zone
cursive at snf.stanford.edu
cursive at snf.stanford.edu
Mon Nov 9 21:05:49 PST 2009
When running the process, it shows this error message. And process is aborded.
More information about the epi2-pcs
mailing list