Shutdown epi2 SNF 2009-11-30 11:00:22: no wafer on blade

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Nov 30 15:08:20 PST 2009


None of the wafer sensors on the transfer chamber were working.  Disabled and re-enable the wafer sensors.  Moved wafer from LL to cool station several times with no problems.  Need to run a wafer through the entire sequence.  I did not have any clean wafers and I did not want to the use the user's wafers as dummies.




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