November 2009 Archives by date

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Starting: Sun Nov 1 22:47:40 PST 2009
Ending: Mon Nov 30 15:39:14 PST 2009
Messages: 48

• Problem epi2 SNF 2009-11-01 22:47:39: error occurred   junam at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-02 08:19:35: Intermittent rotation errors   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2009-11-02 13:30:49: wafer stuck in chamber   gyama at snf.stanford.edu
• Comment epi2 SNF 2009-11-02 14:34:51: Update rotation problem   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-11-04 13:34:21: Update rotation.   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-11-06 14:55:40: Update rotation error   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2009-11-02 13:30:49: wafer stuck in chamber   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-11-02 14:34:51: Update rotation problem   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-11-01 22:47:39: error occurred   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-10-28 06:48:19: Ch A. Rotation Stepper Failure   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-10-26 11:42:01: ran SiH4 autoseed w/ DCS   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-11-04 13:34:21: Update rotation.   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-06 16:17:36: no heat   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-06 16:17:36: no heat   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-11-06 14:55:40: Update rotation error   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-02 08:19:35: Intermittent rotation errors   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-10-15 23:39:35: heater contactor off error.   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-08 00:36:56:   junam at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-08 00:38:34: wafer stuck in chamber A   junam at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-08 00:36:56:   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-08 00:38:34: wafer stuck in chamber A   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2009-11-09 20:53:11: LoadLock pump fail, warning   cursive at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-09 21:05:49: chamber A bulb failed in lower outer zone   cursive at snf.stanford.edu
• Comment epi2 SNF 2009-11-10 15:21:10: Update   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-09 21:05:49: chamber A bulb failed in lower outer zone   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-11-10 15:21:10: Update   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2009-11-09 20:53:11: LoadLock pump fail, warning   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-09-28 08:55:50: Replaced HCl cylinder   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-12 10:36:56: exhaust   mdickey at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-12 10:36:56: exhaust   mdickey at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-14 10:25:12: shut down due to A bulb failed in upper inner zone   ryw at snf.stanford.edu
• Comment epi2 SNF 2009-11-16 14:51:00: Update bulb failure   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-11-17 14:38:46: Update bulb failure   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-11-19 14:33:22: Update bulb failure   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-11-20 09:56:54: Update bulb failure   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-14 10:25:12: shut down due to A bulb failed in upper inner zone   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-11-16 14:51:00: Update bulb failure   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-11-17 14:38:46: Update bulb failure   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-11-19 14:33:22: Update bulb failure   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-11-20 09:56:54: Update bulb failure   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-10-08 22:31:13: haze surface with big dots   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-11-23 17:44:57: Upper Inner Bulbs   slcheng at snf.stanford.edu
• Comment epi2 SNF 2009-11-24 11:38:32: Update upper inner bulbs   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2009-11-25 13:43:30: Lower outter lamp failed   renshen at snf.stanford.edu
• Problem epi2 SNF 2009-11-25 13:43:30: Lower outter lamp failed   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-30 11:00:22: no wafer on blade   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-30 11:00:22: no wafer on blade   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-11-30 15:39:14: no wafer on blade   maurice at snf.stanford.edu

Last message date: Mon Nov 30 15:39:14 PST 2009
Archived on: Sun Dec 23 08:52:53 PST 2012

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