From jrjain at snf.stanford.edu Wed Oct 7 14:37:03 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Wed, 7 Oct 2009 14:37:03 -0700 Subject: Shutdown epi2 SNF 2009-10-07 14:37:02: Bulb Failure & Potential PCV issue Message-ID: Upper Inner bulb failure. Elmer witnessed bulb & potential PCV problems. From eenriquez at snf.stanford.edu Thu Oct 8 11:02:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:02:34 -0700 Subject: Shutdown epi2 SNF 2009-10-07 14:37:02: Bulb Failure & Potential PCV issue Message-ID: Replaced 5 burnt-out bulbs. Ran Ge-etchcoat recipe with no problems. Left user's wafers in LLA From ryw at snf.stanford.edu Thu Oct 8 22:31:13 2009 From: ryw at snf.stanford.edu (ryw at snf.stanford.edu) Date: Thu, 8 Oct 2009 22:31:13 -0700 Subject: Comment epi2 SNF 2009-10-08 22:31:13: haze surface with big dots Message-ID: From jrjain at snf.stanford.edu Sun Oct 11 11:04:18 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Sun, 11 Oct 2009 11:04:18 -0700 Subject: Problem epi2 SNF 2009-10-11 11:04:18: Chamber A Rotation Stepper Failure Message-ID: Ran 4 wafers without problem but failed before taking the 5th into the chamber. From gth at snf.stanford.edu Thu Oct 15 23:39:35 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 15 Oct 2009 23:39:35 -0700 Subject: Problem epi2 SNF 2009-10-15 23:39:35: heater contactor off error. Message-ID: From slcheng at snf.stanford.edu Sun Oct 18 07:53:53 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Sun, 18 Oct 2009 07:53:53 -0700 Subject: Problem epi2 SNF 2009-10-18 07:53:53: Fail on rotation homing Message-ID: This messgage showed up in the middle of the auto process. It happened 2 times within these two days. From tberg at snf.stanford.edu Tue Oct 20 06:04:10 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Oct 2009 06:04:10 -0700 Subject: Problem epi2 SNF 2009-10-20 06:04:10: DCS cabinet Mod Message-ID: No DCS until Mod is completed From tberg at snf.stanford.edu Mon Oct 26 10:03:36 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 26 Oct 2009 10:03:36 -0700 Subject: Problem epi2 SNF 2009-10-20 06:04:10: DCS cabinet Mod Message-ID: DCS is back on From gyama at snf.stanford.edu Mon Oct 26 11:42:02 2009 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 26 Oct 2009 11:42:02 -0700 Subject: Comment epi2 SNF 2009-10-26 11:42:01: ran SiH4 autoseed w/ DCS Message-ID: on Si, looks smooth, grew ~2.73um, hi-phos, normal thickness looks good From slcheng at snf.stanford.edu Tue Oct 27 13:16:37 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Tue, 27 Oct 2009 13:16:37 -0700 Subject: Problem epi2 SNF 2009-10-27 13:16:37: stepper homing problem Message-ID: as titled From jrjain at snf.stanford.edu Wed Oct 28 06:48:20 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Wed, 28 Oct 2009 06:48:20 -0700 Subject: Problem epi2 SNF 2009-10-28 06:48:19: Ch A. Rotation Stepper Failure Message-ID: Same problem as before. During Ge Etch Coat after last of 5 processed wafers. From eenriquez at snf.stanford.edu Wed Oct 28 09:39:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Oct 2009 09:39:47 -0700 Subject: Comment epi2 SNF 2009-10-28 09:39:46: Rotation homing update Message-ID: Secured the rotation home sensor cable. Cycled the susceptor lift and rotation 20x without any problems. Will continue to monitor the problem. From eenriquez at snf.stanford.edu Thu Oct 29 07:29:45 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 29 Oct 2009 07:29:45 -0700 Subject: Problem epi2 SNF 2009-10-11 11:04:18: Chamber A Rotation Stepper Failure Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 29 07:29:55 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 29 Oct 2009 07:29:55 -0700 Subject: Problem epi2 SNF 2009-10-18 07:53:53: Fail on rotation homing Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 29 07:30:16 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 29 Oct 2009 07:30:16 -0700 Subject: Problem epi2 SNF 2009-10-27 13:16:37: stepper homing problem Message-ID: Archived From jrjain at snf.stanford.edu Thu Oct 29 21:27:51 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 29 Oct 2009 21:27:51 -0700 Subject: Shutdown epi2 SNF 2009-10-29 21:27:50: Lift Faults Message-ID: During GE ETCH COAT, received "Chamber A lift cannot reach process position." Reset chamber, received "Chamber A lift cannot reach home position." We have seen this error numerous times. What is being done to address it? Why hasn't it been fixed yet? From slcheng at snf.stanford.edu Fri Oct 30 02:02:04 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Fri, 30 Oct 2009 02:02:04 -0700 Subject: Shutdown epi2 SNF 2009-10-30 02:02:03: wafer stuck in chamber A (Lift problem) Message-ID: i made the machine back to Active idle. Test the Ge Etch process. Looks fine. However, when trying to run the wafer with a test recipe, the wafer was stuck inside the chambe A. Fault message shows the wafer is not in process position. I was able to get the wafer out. However, during the wafer inside chamber A, i tried to move the lift from Home to Process and back several times. The same message of "not able to reach process position" showed up twice for totally 5 runs. I think it is obivous that there is a mechanical problem there. By the way, the previous TEST sequencer disapeared. I created a new TEST sequencer. Please confirm if this sequencer is correct or not. From eenriquez at snf.stanford.edu Fri Oct 30 13:48:28 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Oct 2009 13:48:28 -0700 Subject: Shutdown epi2 SNF 2009-10-30 02:02:03: wafer stuck in chamber A (Lift problem) Message-ID: Looks like the wafer has been unloaded. From eenriquez at snf.stanford.edu Fri Oct 30 13:53:27 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Oct 2009 13:53:27 -0700 Subject: Shutdown epi2 SNF 2009-10-29 21:27:50: Lift Faults Message-ID: Increased the susceptor lift speed ( exch to process and process to home). Lubricated the lift shaft. Cycled many times without a problem. Waited about 2 hours and cycled again without a fault. Ran Ge Etch coat. Will continue to monitor the problem. From eenriquez at snf.stanford.edu Fri Oct 30 13:53:44 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Oct 2009 13:53:44 -0700 Subject: Comment epi2 SNF 2009-10-28 09:39:46: Rotation homing update Message-ID: Archived