Shutdown epi2 SNF 2009-10-07 14:37:02: Bulb Failure & Potential PCV issue

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Oct 8 11:02:34 PDT 2009


Replaced 5 burnt-out bulbs.  Ran Ge-etchcoat recipe with no problems.
Left user's wafers in LLA




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