Shutdown epi2 SNF 2009-10-07 14:37:02: Bulb Failure & Potential PCV issue

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Oct 8 11:02:34 PDT 2009

Previous message: Shutdown epi2 SNF 2009-10-07 14:37:02: Bulb Failure & Potential PCV issue
Next message: Comment epi2 SNF 2009-10-08 22:31:13: haze surface with big dots
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Replaced 5 burnt-out bulbs.  Ran Ge-etchcoat recipe with no problems.
Left user's wafers in LLA

Previous message: Shutdown epi2 SNF 2009-10-07 14:37:02: Bulb Failure & Potential PCV issue
Next message: Comment epi2 SNF 2009-10-08 22:31:13: haze surface with big dots
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list