Problem epi2 SNF 2009-10-11 11:04:18: Chamber A Rotation Stepper Failure

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Sun Oct 11 11:04:18 PDT 2009


Ran 4 wafers without problem but failed before taking the 5th into the chamber.




More information about the epi2-pcs mailing list