Problem epi2 SNF 2009-10-11 11:04:18: Chamber A Rotation Stepper Failure

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Sun Oct 11 11:04:18 PDT 2009

Previous message: Comment epi2 SNF 2009-10-08 22:31:13: haze surface with big dots
Next message: Problem epi2 SNF 2009-10-11 11:04:18: Chamber A Rotation Stepper Failure
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Ran 4 wafers without problem but failed before taking the 5th into the chamber.

Previous message: Comment epi2 SNF 2009-10-08 22:31:13: haze surface with big dots
Next message: Problem epi2 SNF 2009-10-11 11:04:18: Chamber A Rotation Stepper Failure
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list