Comment epi2 SNF 2009-10-26 11:42:01: ran SiH4 autoseed w/ DCS

gyama at snf.stanford.edu gyama at snf.stanford.edu
Mon Oct 26 11:42:02 PDT 2009


on Si, looks smooth, grew ~2.73um, hi-phos, normal thickness
looks good




More information about the epi2-pcs mailing list