Problem epi2 SNF 2009-10-11 11:04:18: Chamber A Rotation Stepper Failure
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Oct 29 07:29:45 PDT 2009
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Problem epi2 SNF 2009-10-11 11:04:18: Chamber A Rotation Stepper Failure
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Problem epi2 SNF 2009-10-11 11:04:18: Chamber A Rotation Stepper Failure
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Problem epi2 SNF 2009-10-15 23:39:35: heater contactor off error.
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