Shutdown epi2 SNF 2009-10-29 21:27:50: Lift Faults

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Thu Oct 29 21:27:51 PDT 2009


During GE ETCH COAT, received "Chamber A lift cannot reach process position."
Reset chamber, received "Chamber A lift cannot reach home position."
We have seen this error numerous times.  What is being done to address it?  Why hasn't it been fixed yet?




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