Shutdown epi2 SNF 2009-10-29 21:27:50: Lift Faults

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Oct 30 13:53:27 PDT 2009


Increased the susceptor lift speed ( exch to process and process to home).  Lubricated the lift shaft.  Cycled many times without a problem.  Waited about 2 hours and cycled again without a fault.  Ran Ge Etch coat.
Will continue to monitor the problem.




More information about the epi2-pcs mailing list