October 2009 Archives by author

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Starting: Wed Oct 7 14:37:03 PDT 2009
Ending: Fri Oct 30 13:53:44 PDT 2009
Messages: 20

• Shutdown epi2 SNF 2009-10-07 14:37:02: Bulb Failure & Potential PCV issue   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-10-28 09:39:46: Rotation homing update   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2009-10-11 11:04:18: Chamber A Rotation Stepper Failure   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2009-10-18 07:53:53: Fail on rotation homing   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2009-10-27 13:16:37: stepper homing problem   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-10-30 02:02:03: wafer stuck in chamber A (Lift problem)   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-10-29 21:27:50: Lift Faults   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-10-28 09:39:46: Rotation homing update   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2009-10-15 23:39:35: heater contactor off error.   gth at snf.stanford.edu
• Comment epi2 SNF 2009-10-26 11:42:01: ran SiH4 autoseed w/ DCS   gyama at snf.stanford.edu
• Shutdown epi2 SNF 2009-10-07 14:37:02: Bulb Failure & Potential PCV issue   jrjain at snf.stanford.edu
• Problem epi2 SNF 2009-10-11 11:04:18: Chamber A Rotation Stepper Failure   jrjain at snf.stanford.edu
• Problem epi2 SNF 2009-10-28 06:48:19: Ch A. Rotation Stepper Failure   jrjain at snf.stanford.edu
• Shutdown epi2 SNF 2009-10-29 21:27:50: Lift Faults   jrjain at snf.stanford.edu
• Comment epi2 SNF 2009-10-08 22:31:13: haze surface with big dots   ryw at snf.stanford.edu
• Problem epi2 SNF 2009-10-18 07:53:53: Fail on rotation homing   slcheng at snf.stanford.edu
• Problem epi2 SNF 2009-10-27 13:16:37: stepper homing problem   slcheng at snf.stanford.edu
• Shutdown epi2 SNF 2009-10-30 02:02:03: wafer stuck in chamber A (Lift problem)   slcheng at snf.stanford.edu
• Problem epi2 SNF 2009-10-20 06:04:10: DCS cabinet Mod   tberg at snf.stanford.edu
• Problem epi2 SNF 2009-10-20 06:04:10: DCS cabinet Mod   tberg at snf.stanford.edu

Last message date: Fri Oct 30 13:53:44 PDT 2009
Archived on: Sun Dec 23 08:52:53 PST 2012

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