From maurice at snf.stanford.edu Wed Sep 2 11:40:14 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Sep 2009 11:40:14 -0700 Subject: Comment epi2 SNF 2009-09-02 11:40:14: testing wafer handling Message-ID: Testing wafer handling after AMAT FS visit From maurice at snf.stanford.edu Wed Sep 2 17:03:48 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Sep 2009 17:03:48 -0700 Subject: Shutdown epi2 SNF 2009-08-23 20:28:45: Wafer stuck in the process chamber Message-ID: Sean from AMAT field service came in and adjusted wafer lift piston pressures. He found that our system's air lines were labled incorrectly in the factor. He made the corrections in our maint manual. - Sean found that someone had changed the default rotation speed had been changed to zero. Some user recipes have the speed defined...if it is not defined the system will use the default value. This would explain why some users had rotation time out errors and other did not. - Sean found that our loadlock cassettes have been damaged. Users have melted some of the slots by not cooling the wafers before moving wafers manually from the process chamber to the cassettes. The damaged slots can cause wafer loading errors. We are in the process of getting metal cassettes. Once we get the cassettes are here we have to have the cassette holders machine to hold these new cassettes. (The current holders where machined specifically for current cassettes...metal cassettes don't fit). - Until we get the new cassettes, avoid using slots 1-5 and 20-25 of both cassettes. - We moved in /out over 30 wafers and processed another 10 without machanical problems. - System is back up. From shott at snf.stanford.edu Sat Sep 5 11:59:48 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 5 Sep 2009 11:59:48 -0700 Subject: Shutdown epi2 SNF 2009-09-05 11:59:48: HCl leak .... Message-ID: HCl leakage of about 15 ppm in the cabinet to the right of the one that has the active cylinder. The leak appears to be coming from a joint behind the old panel just before the line goes out of that cabinet (beyond the tank select valve.). John From eenriquez at snf.stanford.edu Tue Sep 8 15:57:25 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Sep 2009 15:57:25 -0700 Subject: Comment epi2 SNF 2009-09-08 15:57:24: Update Message-ID: Should complete the HCl cabinet clean-up tomorrow. New gas line should be done maybe tomorrow but most likely Thursday. From maurice at snf.stanford.edu Tue Sep 8 16:54:23 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 Sep 2009 16:54:23 -0700 Subject: Problem epi2 SNF 2009-08-21 06:07:12: error Message-ID: Lift air adjusted From maurice at snf.stanford.edu Tue Sep 8 16:54:55 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 Sep 2009 16:54:55 -0700 Subject: Problem epi2 SNF 2009-08-20 06:19:46: Could not run in auto mode Message-ID: Auto mode working From maurice at snf.stanford.edu Tue Sep 8 16:56:00 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 8 Sep 2009 16:56:00 -0700 Subject: Problem epi2 SNF 2009-06-17 09:46:12: hazy deps gone + particles stay Message-ID: logged From eenriquez at snf.stanford.edu Wed Sep 9 19:13:17 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Sep 2009 19:13:17 -0700 Subject: Comment epi2 SNF 2009-09-09 19:13:17: Update Message-ID: Completed the gas line repair. Pumped and purged the gas line. Will leak check the line tomorrow. System should be ready by noon. From eenriquez at snf.stanford.edu Thu Sep 10 12:33:18 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Sep 2009 12:33:18 -0700 Subject: Shutdown epi2 SNF 2009-09-05 11:59:48: HCl leak .... Message-ID: Completed gas line repair, leak checked and purged. Ran the Megaetch recipe with no problems. From eenriquez at snf.stanford.edu Thu Sep 10 12:33:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Sep 2009 12:33:30 -0700 Subject: Comment epi2 SNF 2009-09-08 15:57:24: Update Message-ID: archived From eenriquez at snf.stanford.edu Thu Sep 10 12:33:38 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Sep 2009 12:33:38 -0700 Subject: Comment epi2 SNF 2009-09-09 19:13:17: Update Message-ID: Archived From jrjain at snf.stanford.edu Fri Sep 11 13:02:44 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 11 Sep 2009 13:02:44 -0700 Subject: Shutdown epi2 SNF 2009-09-11 13:02:43: Chamber A Rotation Stepper Failed Homing Message-ID: From maurice at snf.stanford.edu Fri Sep 11 14:33:57 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Sep 2009 14:33:57 -0700 Subject: Shutdown epi2 SNF 2009-09-11 13:02:43: Chamber A Rotation Stepper Failed Homing Message-ID: Useer ryw rest chamber. Run wafers in a out of chamber 6 or 7 times with no problem. From edfei at snf.stanford.edu Mon Sep 14 14:24:31 2009 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Mon, 14 Sep 2009 14:24:31 -0700 Subject: Comment epi2 SNF 2009-09-14 14:24:31: Use LLA Message-ID: use of LLB gives a system automode error from wafer miscentering. use LLA. From maurice at snf.stanford.edu Thu Sep 24 14:45:21 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 Sep 2009 14:45:21 -0700 Subject: Problem epi2 SNF 2009-07-10 00:37:34: white dot on the right edge of the wafer Message-ID: ryw reports now spots...he is happy with his depositions From maurice at snf.stanford.edu Thu Sep 24 14:45:53 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 Sep 2009 14:45:53 -0700 Subject: Problem epi2 SNF 2009-07-20 22:41:06: haze around the edge Message-ID: ryw reports no spots or haze...he is happy with his depositions From maurice at snf.stanford.edu Thu Sep 24 14:46:08 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 Sep 2009 14:46:08 -0700 Subject: Comment epi2 SNF 2009-09-02 11:40:14: testing wafer handling Message-ID: complete From maurice at snf.stanford.edu Thu Sep 24 14:46:16 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 Sep 2009 14:46:16 -0700 Subject: Comment epi2 SNF 2009-08-31 14:51:33: Update Message-ID: logged From maurice at snf.stanford.edu Thu Sep 24 14:53:02 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 Sep 2009 14:53:02 -0700 Subject: Comment epi2 SNF 2009-08-31 11:54:52: process lift error again Message-ID: AMAT FS came in and address this issue From maurice at snf.stanford.edu Thu Sep 24 14:53:11 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 Sep 2009 14:53:11 -0700 Subject: Comment epi2 SNF 2009-08-28 14:42:57: Update Message-ID: logged From maurice at snf.stanford.edu Thu Sep 24 14:53:34 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 Sep 2009 14:53:34 -0700 Subject: Comment epi2 SNF 2009-08-20 20:18:57: alarmed, but ran Message-ID: Addressed by AMAT FS From maurice at snf.stanford.edu Thu Sep 24 14:53:44 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 Sep 2009 14:53:44 -0700 Subject: Comment epi2 SNF 2009-08-19 09:40:51: Update homing problem Message-ID: logged From maurice at snf.stanford.edu Thu Sep 24 14:54:06 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 Sep 2009 14:54:06 -0700 Subject: Comment epi2 SNF 2008-12-01 12:51:52: is there a spare 1% Phosphine bottle? Message-ID: logged From maurice at snf.stanford.edu Thu Sep 24 15:05:00 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 Sep 2009 15:05:00 -0700 Subject: Problem epi2 SNF 2007-09-28 13:54:02: D-Dop1 MFC recalibration Message-ID: D-Dop1 is a 500sccm MFC and is calibrated for 500sccm. From maurice at snf.stanford.edu Thu Sep 24 15:08:46 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 Sep 2009 15:08:46 -0700 Subject: Problem epi2 SNF 2007-09-19 18:19:46: MFC Message-ID: cleared and restated as a comment From maurice at snf.stanford.edu Thu Sep 24 15:10:24 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 24 Sep 2009 15:10:24 -0700 Subject: Comment epi2 SNF 2009-09-24 15:10:23: D-Dop1 need zero cal Message-ID: rshyam reports: When we look at the gas flows in "Monitor gas panels", most gases are showing reasonable flows even when the setpoint is zero. For example, D-DOP1 shows a flow of 4.6 sccm when the MFC is supposed to be completely closed. This is probably a zero-calibration issue. Please look into this. From eenriquez at snf.stanford.edu Mon Sep 28 08:55:51 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Sep 2009 08:55:51 -0700 Subject: Comment epi2 SNF 2009-09-28 08:55:50: Replaced HCl cylinder Message-ID: