September 2009 Archives by thread

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Starting: Wed Sep 2 11:40:14 PDT 2009
Ending: Mon Sep 28 08:55:51 PDT 2009
Messages: 27

• Comment epi2 SNF 2009-09-02 11:40:14: testing wafer handling   maurice at snf.stanford.edu
  • Comment epi2 SNF 2009-09-02 11:40:14: testing wafer handling   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-08-23 20:28:45: Wafer stuck in the process chamber   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2009-09-05 11:59:48: HCl leak ....   shott at snf.stanford.edu
  • Shutdown epi2 SNF 2009-09-05 11:59:48: HCl leak ....   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2009-09-08 15:57:24: Update   eenriquez at snf.stanford.edu
  • Comment epi2 SNF 2009-09-08 15:57:24: Update   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2009-08-21 06:07:12: error   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-08-20 06:19:46: Could not run in auto mode   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-06-17 09:46:12: hazy deps gone + particles stay   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-09-09 19:13:17: Update   eenriquez at snf.stanford.edu
  • Comment epi2 SNF 2009-09-09 19:13:17: Update   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2009-09-11 13:02:43: Chamber A Rotation Stepper Failed Homing   jrjain at snf.stanford.edu
  • Shutdown epi2 SNF 2009-09-11 13:02:43: Chamber A Rotation Stepper Failed Homing   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-09-14 14:24:31: Use LLA   edfei at snf.stanford.edu
• Problem epi2 SNF 2009-07-10 00:37:34: white dot on the right edge of the wafer   maurice at snf.stanford.edu
• Problem epi2 SNF 2009-07-20 22:41:06: haze around the edge   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-08-31 14:51:33: Update   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-08-31 11:54:52: process lift error again   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-08-28 14:42:57: Update   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-08-20 20:18:57: alarmed, but ran   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-08-19 09:40:51: Update homing problem   maurice at snf.stanford.edu
• Comment epi2 SNF 2008-12-01 12:51:52: is there a spare 1% Phosphine bottle?   maurice at snf.stanford.edu
• Problem epi2 SNF 2007-09-28 13:54:02: D-Dop1 MFC recalibration   maurice at snf.stanford.edu
• Problem epi2 SNF 2007-09-19 18:19:46: MFC   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-09-24 15:10:23: D-Dop1 need zero cal   maurice at snf.stanford.edu
• Comment epi2 SNF 2009-09-28 08:55:50: Replaced HCl cylinder   eenriquez at snf.stanford.edu

Last message date: Mon Sep 28 08:55:51 PDT 2009
Archived on: Sun Dec 23 08:52:53 PST 2012

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