From maurice at snf.stanford.edu Thu Apr 1 14:14:35 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Apr 2010 14:14:35 -0700 Subject: Comment epi2 SNF 2010-03-31 08:33:25: Update Message-ID: We created an etch program to run at 1000c instead of 1190c and extended the etch time. After several etches we saw the active idle temp come back to the normal ~700c reading. We did the 20Kw test and got normal values... which tells us that the coated spot on the lower dome cleared. We ran the Ge etch recipes 7 times to make sure we didn't still have the contactor shutting off issue. And we ran a megaetch to check the silicon etch as well. From maurice at snf.stanford.edu Thu Apr 1 14:15:00 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Apr 2010 14:15:00 -0700 Subject: Shutdown epi2 SNF 2010-03-29 15:39:56: contact shutting off during etch Message-ID: Etch coating from lower dome From maurice at snf.stanford.edu Thu Apr 1 14:15:47 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Apr 2010 14:15:47 -0700 Subject: Shutdown epi2 SNF 2010-03-29 08:38:18: Lower pyro low temp Message-ID: Etch coating from lower dome. We did the 20Kw test and got normal values... which tells us that the coated spot on the lower dome cleared. From maurice at snf.stanford.edu Thu Apr 1 14:16:15 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Apr 2010 14:16:15 -0700 Subject: Problem epi2 SNF 2010-03-28 11:07:13: take long time to ramp to 1000'C Message-ID: etched coating on lower dome From maurice at snf.stanford.edu Thu Apr 1 14:16:25 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 1 Apr 2010 14:16:25 -0700 Subject: Problem epi2 SNF 2010-03-26 09:55:55: low wafer flow problem during etch coat Message-ID: etched coating on lower dome From maurice at snf.stanford.edu Fri Apr 2 08:44:02 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 2 Apr 2010 08:44:02 -0700 Subject: Problem epi2 SNF 2010-03-19 12:19:32: Ch A heater contactor off & low water flow Message-ID: EE has flushed the quick disconnects in the systems cooling loop. It is working ok now. From maurice at snf.stanford.edu Fri Apr 2 08:44:48 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 2 Apr 2010 08:44:48 -0700 Subject: Problem epi2 SNF 2010-03-24 00:43:03: Wafer sense failed on LLB Message-ID: Couldn't get problem to repeat. If it happens again please report it again. From narii at snf.stanford.edu Sat Apr 10 14:13:19 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 10 Apr 2010 14:13:19 -0700 Subject: Comment epi2 SNF 2010-04-10 14:13:18: One of the cassette left outside Message-ID: LLA was empty. From narii at snf.stanford.edu Sat Apr 10 19:56:09 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 10 Apr 2010 19:56:09 -0700 Subject: Problem epi2 SNF 2010-04-10 19:56:08: Centerfinder error Message-ID: It says "wafer is too far from the center". Unable to place wafer to the chamber. From maurice at snf.stanford.edu Mon Apr 12 10:44:59 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 12 Apr 2010 10:44:59 -0700 Subject: Problem epi2 SNF 2010-04-12 10:44:58: Load Lock B not working Message-ID: LLB is not mapping wafers. Use LLA From maurice at snf.stanford.edu Mon Apr 12 10:45:12 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 12 Apr 2010 10:45:12 -0700 Subject: Comment epi2 SNF 2010-04-10 14:13:18: One of the cassette left outside Message-ID: logged From maurice at snf.stanford.edu Mon Apr 12 10:45:55 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 12 Apr 2010 10:45:55 -0700 Subject: Comment epi2 SNF 2010-04-12 10:45:55: Cassettes scribed Message-ID: Use the correct cassette in the correct load lock. From maurice at snf.stanford.edu Mon Apr 12 10:47:53 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 12 Apr 2010 10:47:53 -0700 Subject: Problem epi2 SNF 2010-04-10 19:56:08: Centerfinder error Message-ID: wrong cassette used. Cassettes are scribed. Only use cassette A in Load Lock A. B for B From maurice at snf.stanford.edu Mon Apr 12 10:48:18 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 12 Apr 2010 10:48:18 -0700 Subject: Problem epi2 SNF 2010-04-12 10:48:17: No DCS Message-ID: From tberg at snf.stanford.edu Tue Apr 13 06:33:20 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 13 Apr 2010 06:33:20 -0700 Subject: Shutdown epi2 SNF 2010-04-13 06:33:20: purging gas lines for epi 1 move Message-ID: From tberg at snf.stanford.edu Wed Apr 14 14:10:15 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 14 Apr 2010 14:10:15 -0700 Subject: Shutdown epi2 SNF 2010-04-13 06:33:20: purging gas lines for epi 1 move Message-ID: Gaslines purged and back on. With the exception of GeH4 which has been changed and DCS which will be changed this afternoon. From tberg at snf.stanford.edu Wed Apr 14 14:10:54 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 14 Apr 2010 14:10:54 -0700 Subject: Problem epi2 SNF 2010-04-14 14:10:54: GeH4 Cylinder changed in leak check Message-ID: From dongrip at snf.stanford.edu Thu Apr 15 04:43:51 2010 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Thu, 15 Apr 2010 04:43:51 -0700 Subject: Problem epi2 SNF 2010-04-15 04:43:50: can't proceed hot idle from cold idle Message-ID: error: Chamber A bulb failed in UPPER INNER zone. From maurice at snf.stanford.edu Thu Apr 15 08:21:10 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 15 Apr 2010 08:21:10 -0700 Subject: Shutdown epi2 SNF 2010-04-15 08:21:09: error: Chamber A bulb failed in UPPER INNER zone Message-ID: From tberg at snf.stanford.edu Thu Apr 15 09:22:27 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 15 Apr 2010 09:22:27 -0700 Subject: Problem epi2 SNF 2010-04-14 14:10:54: GeH4 Cylinder changed in leak check Message-ID: Leak check Ok back on line From seymour at snf.stanford.edu Thu Apr 15 14:30:51 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 Apr 2010 14:30:51 -0700 Subject: Problem epi2 SNF 2010-04-15 14:30:51: dichlorosilane now on, needs testing Message-ID: From eenriquez at snf.stanford.edu Thu Apr 15 15:11:07 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 Apr 2010 15:11:07 -0700 Subject: Comment epi2 SNF 2010-04-15 15:11:07: Update bulb failure Message-ID: Unable to find the "bad" bulb. Ohmmeter readings for all the lamp loops were good (1.8 ohm). Started checking the lamp sockets. No obviously bad socket, need to check them one at a time. From eenriquez at snf.stanford.edu Fri Apr 16 14:22:09 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Apr 2010 14:22:09 -0700 Subject: Comment epi2 SNF 2010-04-16 14:22:09: Updatge Message-ID: Still unable to locate the problem. Field service will be here on Monday. From eenriquez at snf.stanford.edu Thu Apr 22 14:24:52 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Apr 2010 14:24:52 -0700 Subject: Comment epi2 SNF 2010-04-22 14:24:52: Update lamp problem Message-ID: Still waiting on field service. Apparently, there is some crisis at another customer site. Applied Materials did send a software engineer here to try and pin point the source of the problem. His conclusion was that it might be a defective lamp power supply but that the hardware (Sean) will have to verify it. From eenriquez at snf.stanford.edu Mon Apr 26 15:00:33 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 26 Apr 2010 15:00:33 -0700 Subject: Comment epi2 SNF 2010-04-26 15:00:33: Update Message-ID: Defective lamp power supply. Need to replace a bad component. Having a difficult time locating a vendor who has a thyristor module in stock. The manufacturer is Semikron and the part# is SKKT 92/12E. From maurice at snf.stanford.edu Fri Apr 30 14:50:54 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 Apr 2010 14:50:54 -0700 Subject: Comment epi2 SNF 2010-04-30 14:50:53: Epi Update 4-30-10 Message-ID: System showing overpressure error. Can't test power supply yet.