Shutdown epi2 SNF 2010-03-29 15:39:56: contact shutting off during etch
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Thu Apr 1 14:15:00 PDT 2010
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Comment epi2 SNF 2010-03-31 08:33:25: Update
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Etch coating from lower dome
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Comment epi2 SNF 2010-03-31 08:33:25: Update
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Shutdown epi2 SNF 2010-03-29 08:38:18: Lower pyro low temp
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