Problem epi2 SNF 2010-03-28 11:07:13: take long time to ramp to 1000'C
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Thu Apr 1 14:16:15 PDT 2010
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Shutdown epi2 SNF 2010-03-29 08:38:18: Lower pyro low temp
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Problem epi2 SNF 2010-03-26 09:55:55: low wafer flow problem during etch coat
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etched coating on lower dome
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Shutdown epi2 SNF 2010-03-29 08:38:18: Lower pyro low temp
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Problem epi2 SNF 2010-03-26 09:55:55: low wafer flow problem during etch coat
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