April 2010 Archives by author

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Starting: Thu Apr 1 14:14:35 PDT 2010
Ending: Fri Apr 30 14:50:54 PDT 2010
Messages: 26

• Problem epi2 SNF 2010-04-15 04:43:50: can't proceed hot idle from cold idle   dongrip at snf.stanford.edu
• Comment epi2 SNF 2010-04-15 15:11:07: Update bulb failure   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2010-04-16 14:22:09: Updatge   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2010-04-22 14:24:52: Update lamp problem   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2010-04-26 15:00:33: Update   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2010-03-31 08:33:25: Update   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2010-03-29 15:39:56: contact shutting off during etch   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2010-03-29 08:38:18: Lower pyro low temp   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-03-28 11:07:13: take long time to ramp to 1000'C   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-03-26 09:55:55: low wafer flow problem during etch coat   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-03-19 12:19:32: Ch A heater contactor off & low water flow   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-03-24 00:43:03: Wafer sense failed on LLB   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-04-12 10:44:58: Load Lock B not working   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-04-10 14:13:18: One of the cassette left outside   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-04-12 10:45:55: Cassettes scribed   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-04-10 19:56:08: Centerfinder error   maurice at snf.stanford.edu
• Problem epi2 SNF 2010-04-12 10:48:17: No DCS   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2010-04-15 08:21:09: error: Chamber A bulb failed in UPPER INNER zone   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-04-30 14:50:53: Epi Update 4-30-10   maurice at snf.stanford.edu
• Comment epi2 SNF 2010-04-10 14:13:18: One of the cassette left outside   narii at snf.stanford.edu
• Problem epi2 SNF 2010-04-10 19:56:08: Centerfinder error   narii at snf.stanford.edu
• Problem epi2 SNF 2010-04-15 14:30:51: dichlorosilane now on, needs testing   seymour at snf.stanford.edu
• Shutdown epi2 SNF 2010-04-13 06:33:20: purging gas lines for epi 1 move   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2010-04-13 06:33:20: purging gas lines for epi 1 move   tberg at snf.stanford.edu
• Problem epi2 SNF 2010-04-14 14:10:54: GeH4 Cylinder changed in leak check   tberg at snf.stanford.edu
• Problem epi2 SNF 2010-04-14 14:10:54: GeH4 Cylinder changed in leak check   tberg at snf.stanford.edu

Last message date: Fri Apr 30 14:50:54 PDT 2010
Archived on: Sun Dec 23 08:52:55 PST 2012

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