From cursive at snf.stanford.edu Mon Aug 2 11:59:33 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Mon, 2 Aug 2010 11:59:33 -0700 Subject: Problem epi2 SNF 2010-08-02 11:59:33: epi chamber A wafer out of pocket Message-ID: warning message From slcheng at snf.stanford.edu Tue Aug 3 10:31:12 2010 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Tue, 3 Aug 2010 10:31:12 -0700 Subject: Problem epi2 SNF 2010-08-03 10:31:12: backside coating Message-ID: got backside coating for all three wafers i processed yesterday. Please check if the transfer arm is centered. From jasonlin at snf.stanford.edu Mon Aug 9 21:02:35 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Mon, 9 Aug 2010 21:02:35 -0700 Subject: Problem epi2 SNF 2010-08-09 21:02:35: ChA Bulb Failure Message-ID: When I came in to check on my wafers, the system was in Inert Idle with the message that ChA bulb failed and some other similar error messages. Unknown whether system is currently usable. For troubleshooting later: The recipe I was running at the time had a max temperature of 675C. It was the 3rd wafer. The first two wafers ran successfully, although the max temperature for those 2 wafers was only 525C. From maurice at snf.stanford.edu Tue Aug 10 13:44:36 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 10 Aug 2010 13:44:36 -0700 Subject: Shutdown epi2 SNF 2010-08-10 13:44:35: bulb failure Message-ID: From eenriquez at snf.stanford.edu Tue Aug 10 15:06:07 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Aug 2010 15:06:07 -0700 Subject: Shutdown epi2 SNF 2010-08-10 13:44:35: bulb failure Message-ID: Checked bulb circuit resistance. All the circuits were all around 1.8 ohms (good). Ran 3 Ge etchcoats with no problem. Will continue to monitor failiure. From eenriquez at snf.stanford.edu Thu Aug 12 10:39:09 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Aug 2010 10:39:09 -0700 Subject: Problem epi2 SNF 2010-08-09 21:02:35: ChA Bulb Failure Message-ID: Error has not re-occured. From maurice at snf.stanford.edu Thu Aug 12 11:14:21 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Aug 2010 11:14:21 -0700 Subject: Problem epi2 SNF 2010-07-23 03:59:36: LLA cannot be closed Message-ID: door closed From maurice at snf.stanford.edu Thu Aug 12 11:43:37 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 12 Aug 2010 11:43:37 -0700 Subject: Problem epi2 SNF 2010-07-15 12:08:28: Chamber A over pressure Message-ID: have not seen this problem in severasl weeks From slcheng at snf.stanford.edu Sat Aug 14 22:15:48 2010 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Sat, 14 Aug 2010 22:15:48 -0700 Subject: Comment epi2 SNF 2010-08-14 22:15:48: Offset of Dop2 Message-ID: I tried to play with flow rate near 47 sccm for Dop2 If i set the flow rate to 30 and 40 sccm (which should be no gas flow based on previous comments), the machine gave me 43 sccm for both cases. Does that suggest the base line for the MFC of Dop2 is 43 instead of the previous reported 47. It is important to me because i normally use 10 sccm. From jasonlin at snf.stanford.edu Tue Aug 17 02:29:48 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Tue, 17 Aug 2010 02:29:48 -0700 Subject: Problem epi2 SNF 2010-08-17 02:29:47: LLA Door cannot be closed Message-ID: Would not "Close" or "Load/Unload" Had to manually close it and create wafers From tberg at snf.stanford.edu Mon Aug 30 06:28:14 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Aug 2010 06:28:14 -0700 Subject: Comment epi2 SNF 2010-08-30 06:28:14: pumped out AsH3 and PH3 lines Message-ID: pumped out AsH3 and PH3 lines for mfc replacement From eenriquez at snf.stanford.edu Mon Aug 30 09:54:09 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Aug 2010 09:54:09 -0700 Subject: Comment epi2 SNF 2010-08-30 06:28:14: pumped out AsH3 and PH3 lines Message-ID: Completed the mixed dopant mfc replacement. From eenriquez at snf.stanford.edu Mon Aug 30 09:54:50 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Aug 2010 09:54:50 -0700 Subject: Comment epi2 SNF 2010-08-30 09:54:49: Mixed dopant MFC replaced Message-ID: Replaced mixed dopant MFC and tested. From eenriquez at snf.stanford.edu Mon Aug 30 15:26:09 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Aug 2010 15:26:09 -0700 Subject: Shutdown epi2 SNF 2010-08-30 15:26:08: Vendor testing Message-ID: Vendor testing new throttle valve. Should be completed by noon tomorrow. From eenriquez at snf.stanford.edu Tue Aug 31 09:33:57 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Aug 2010 09:33:57 -0700 Subject: Shutdown epi2 SNF 2010-08-30 15:26:08: Vendor testing Message-ID: Vendor testing has been completed. Ran Ge-etch coat with no problems. The system now has a new mixed dopant MFC, throttle valve and light pen. From eenriquez at snf.stanford.edu Tue Aug 31 09:34:04 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Aug 2010 09:34:04 -0700 Subject: Comment epi2 SNF 2010-08-30 09:54:49: Mixed dopant MFC replaced Message-ID: Archived From eenriquez at snf.stanford.edu Tue Aug 31 09:34:23 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Aug 2010 09:34:23 -0700 Subject: Comment epi2 SNF 2010-08-14 22:15:48: Offset of Dop2 Message-ID: Replaced mixed dopant MFC and tested.