Problem epi2 SNF 2010-08-03 10:31:12: backside coating
slcheng at snf.stanford.edu
slcheng at snf.stanford.edu
Tue Aug 3 10:31:12 PDT 2010
got backside coating for all three wafers i processed yesterday. Please check if the transfer arm is centered.
More information about the epi2-pcs
mailing list