Problem epi2 SNF 2010-08-09 21:02:35: ChA Bulb Failure

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Mon Aug 9 21:02:35 PDT 2010


When I came in to check on my wafers, the system was in Inert Idle with the message that ChA bulb failed and some other similar error messages.
Unknown whether system is currently usable.
For troubleshooting later:
The recipe I was running at the time had a max temperature of 675C.  It was the 3rd wafer.  The first two wafers ran successfully, although the max temperature for those 2 wafers was only 525C.




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