Comment epi2 SNF 2010-08-14 22:15:48: Offset of Dop2

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Sat Aug 14 22:15:48 PDT 2010


I tried to play with flow rate near 47 sccm for Dop2
If i set the flow rate to 30 and 40 sccm (which should be no gas flow based on previous comments), the  machine gave me 43 sccm for both cases. Does that suggest the base line for the MFC of Dop2 is 43 instead of the previous reported 47. It is important to me because i normally use 10 sccm.
 




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